Method and apparatus for magnetic recording head having a waveguide

摘要

A method of forming a wave guide for a heat assisted magnetic recording slider of a disk drive includes depositing a layer of waveguide material onto a substrate, and depositing a layer of a hard mask material onto the waveguide material. The method then includes depositing a layer of photoresist onto the hard mask material, and exposing the photoresist to produce a hard mask pattern that includes a waveguide pattern. The method also includes stripping the photoresist material leaving the hard mask pattern having a first line edge roughness. The method also includes removing the waveguide material not covered by the hard mask, the waveguide having sidewalls which having a line edge roughness which is substantially equal to the first line edge roughness. Also disclosed is an apparatus for accomplishing the method.

主权项

1. A waveguide formation method for a heat assisted magnetic recording slider of a disk drive, comprising:
depositing a layer of waveguide material onto a substrate; depositing a layer of a hard mask material onto the waveguide material, wherein the hard mask material comprises Al2O2; depositing a layer of photoresist onto the hard mask material; exposing the photoresist to produce a hard mask pattern that includes a waveguide pattern; stripping the photoresist material leaving the hard mask pattern having a first line edge roughness; and removing the waveguide material not covered by the hard mask pattern to form a waveguide having sidewalls which having a second line edge roughness which is substantially the same as the first line edge roughness associated with the hard mask pattern.