Electronic device having variable capacitance element and manufacture method thereof

摘要

An electronic device having a variable capacitance element, includes a support substrate providing physical support, a pair of anchors formed on the support substrate, and having support portions in a direction perpendicular to a surface of the substrate, a movable electrode supported by the support portions of the pair of anchors, having opposing first and second side surfaces constituting electrode surfaces, and at least partially capable of elastic deformation, a first fixed electrode supported above the support substrate, and having a first electrode surface opposing to the first side surface of the movable electrode, and a second fixed electrode supported above the support substrate, and having a second electrode surface opposing to the second side surface of the movable electrode.

主权项

1. An electronic device having a variable capacitance element, comprising:
a support substrate providing physical support; a pair of anchors formed on said support substrate, and having support portions in direction perpendicular to a surface of said substrate; a movable electrode supported by the support portions of said pair of anchors, having opposing first and second side surfaces constituting electrode surfaces, and at least partially capable of elastic deformation; a first fixed electrode supported above said support substrate, and having a first electrode surface opposing to the first side surface of said movable electrode; a second fixed electrode supported above said support substrate, and having a second electrode surface opposing to the second side surface of said movable electrode; a first insulating film disposed on the first electrode surface of said first fixed electrode; and a second insulating film disposed on the second electrode surface of said second fixed electrode; wherein said movable electrode is made of a metal sheet, and wherein in a space between the first electrode surface of said first fixed electrode and the second electrode surface of said second fixed electrode, said movable electrode is disposed nearer to said first electrode surface than to the second electrode surface at one end, and disposed nearer to said second electrode surface than to said first electrode surface at another end.