Disk handling apparatus and method for supporting a disk during material deposition at a deposition station

摘要

A disk handling apparatus for supporting a disk during material deposition at a deposition station, comprising a disk vacuum paddle having a centrally disposed groove, and a vacuum source disposed within the groove, wherein the paddle contacts the disk only at disk corners on opposing major surfaces of the disk, and wherein the disk remains spaced from the groove at its outer diameter during material deposition.

主权项

1. A disk handling apparatus for supporting a disk during material deposition at a deposition station, comprising:
a disk vacuum paddle having a centrally disposed groove; and a vacuum source disposed within the groove; wherein the paddle contacts the disk only at disk corners on opposing major surfaces of the disk; and wherein the disk remains spaced from the groove at its outer diameter during material deposition; wherein a groove angle of the groove increases from a base of the groove to an upper portion of the groove such that the groove angle is 40 degrees with respect to the major surfaces of the disk at the base of the groove and the groove angle is 80 degrees with respect to the major surfaces of the disk at an upper portion of the groove.