Coil antenna with plural radial lobes

摘要

A low inductance coil antenna for a plasma reactor has plural conductor lobes extending radially from respective RF supply connections.

主权项

1. A coil antenna comprising:
plural conductive lobes extending in respective radial directions with respect to a central axis, each of said plural conductive lobes comprising an elongate conductor having a first end and a second end; and a first connection to the first ends of said plural conductive lobes and a second connection to the second ends of said plural conductive lobes, said first and second connections being adapted for coupling to an RF power source, wherein said first and second connections comprise a pair of conductive rings around said central axis.