CAPACITIVE HUMIDITY SENSOR AND METHOD OF MANUFACTURING THE SAME

摘要

The present invention relates to a capacitive humidity sensor, comprising: an insulation substrate; a polymer humidity sensitive structure formed on the insulation substrate and having recesses formed on an upper portion; and at least a pair of electrodes formed in each recess. Therefore, the present invention can improve sensibility and structural stability. Moreover, the polymer humidity sensitive structure comprises: a polymer layer pattern having the recesses; and a surface treatment pattern formed on an upper surface of the polymer layer pattern.