Curable composition and method of forming pattern

摘要

A curable composition that can be released from a mold simply within a short period of time after photo-curing by a small mold-releasing force is provided. The curable composition contains a gas-generating agent that generates a gas by pressure application. A method of forming a pattern is also provided. In the method, the mold can be released with a small force.

主权项

1. A method of forming a pattern to provide a cured product provided with the pattern on a substrate to be processed, the method comprising:
arranging a curable composition on a substrate to be processed; bringing a mold having a contact surface provided with a depression pattern into contact with the curable composition on the substrate to be processed; curing the curable composition by irradiating the curable composition being in contact with the mold with heat or light; generating a gas by applying a pressure to the curable composition being in contact with the mold; and releasing the mold and the curable composition from each other, wherein the curable composition comprises a polymerizable monomer, a polymerization initiator, and a gas-generating agent that generates a gas by pressure application, wherein the polymerization initiator initiates polymerization of the polymerizable monomer; and the curable composition cures by polymerization of the polymerizable monomer.