Monolithic heat exchanger and apparatus and methods for hydrogenation of a halosilane

摘要

A counter current heat exchanger amenable to fabrication from monolithic materials and particularly useful in corrosive and high temperature environments is described. The heat exchanger uses multiple series of holes bored axially through a monolithic material. Axial holes are bored in adjacent flow paths arranged in closely spaced concentric rings. In operation, counter current flow and heat transfer occurs between multiple adjacent axial flow paths. The heat exchanger design is scaleable over a wide range and particularly useful in reactors for the hydrogenation of halosilanes also using cylindrical heating elements. The design enables a small overall reactor size for a given capacity.

主权项

1. A reactor for hydrogenation of halosilane comprising:
a. a heat exchanger comprising at least three concentric flow channels for counter-current fluid flow, the heat exchanger configured to exchange heat between a reactant gas and a product gas so substantially all net flow is in an axial direction, wherein the reactant gas comprises hydrogen and a halosilane; b. a heater configured to receive and heat the reactant gas from the heat exchanger; and c. a reaction zone configured to convert the heated reactant gas into product gas.