| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem that it is difficult to manufacture a test piece having a fine three-dimensional structure in a micron unit.SOLUTION: A belt-like board 3 is a rectangular solid with a length of 7.0 mm, a width of 0.8 mm, and a thickness of 0.2 mm, and is a silicon substrate in which an evaluation pattern 3a formed by a semiconductor manufacturing process is arranged in the longitudinal direction. The belt-like board 3 located on a column-like pedestal 2c as shown in Fig. 1 is arranged vertically long along a central axis α of a column of an exterior body 2, and included in the exterior body 2. At this time, the evaluation pattern 3a of the belt-like board 3 is arranged along the central axis α of the column.SELECTED DRAWING: Figure 1 |
