| 摘要 |
PROBLEM TO BE SOLVED: To provide a tester of solid-state image sensor capable of determining unevenness in spectroscopy sensitivity among pixels in a solid-state image sensor.SOLUTION: A tester 1 includes: a light source 5 that emits a narrow band light which has a predetermined wave length in center wavelength and a predetermined half band width; and plural solid-state image sensors 11 as the image sensors formed on a wafer 10. The tester reads output signals from plural pixels on the solid-state image sensors 11 which is irradiated with the narrow band light from the light source 5 to determine sensitivity unevenness among plural pixels based on the output signals.SELECTED DRAWING: Figure 1 |
