| 摘要 |
PROBLEM TO BE SOLVED: To provide a cleaning device which can prevent breakage of a pressure sensor while securing a delivery amount of a cleaning liquid.SOLUTION: A cleaning device 1 includes: a motor 562; a pump 576 which is driven by the motor and can pump a cleaning liquid; a connection part which has a discharge port 572 formed so as to discharge the cleaning liquid pumped by the pump, and connects the pump and the discharge port to flow the cleaning liquid; a pressure sensor 579 which is arranged between the pump and the discharge port in the connection part and measures a pressure of the cleaning liquid; a first check valve 575 which is arranged between the pressure sensor and the pump in the connection part and prevents inflow of the cleaning liquid from the pressure sensor to the pump; and a second check valve 577 which is arranged between the pressure sensor and the discharge port in the connection part and prevents inflow of the cleaning liquid from the discharge port to the pressure sensor.SELECTED DRAWING: Figure 4 |
