| 摘要 |
PROBLEM TO BE SOLVED: To provide a process flow check system, a process flow check program, and a process flow check method capable of reducing a time and labor required for checking a process flow, and more surely suppressing a manufacturing defect than a conventional manner.SOLUTION: A process flow check system includes: a manufacturing route generation part 14; a rule information storage part 15; and a check processing part 16. The manufacturing route generation part 14 associates additional information indicating the content of each process of a semiconductor process flow with each process to generate manufacturing route information. A rule information storage part 15 stores rule information in which a rule about a sequence of processes of the manufacturing route information is described by using expressions included in the additional information. The check processing part 16 compares the additional information of the manufacturing route information with the route information to check the propriety of the sequence of the processes of the manufacturing route information.SELECTED DRAWING: Figure 1 |
