AUTOMATIC SAMPLE PIECE MANUFACTURING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide an automatic sample piece manufacturing apparatus for automatizing an operation for extracting and transferring into a sample piece holder, a sample piece formed by processing of a sample by an ion beam.SOLUTION: An automatic sample piece manufacturing apparatus 10 includes a computer 21 for controlling a charged particle beam irradiation optical system 14, and sample piece transfer means so that a charged particle beam is irradiated to a deposition film adhering onto the sample piece transfer means after separating the sample piece transfer means from the sample piece.SELECTED DRAWING: Figure 1