CHARGED PARTICLE BEAM DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a charged particle beam device with which scattered electrons having wide scattering angles can be detected and a clear observation image of a sample can be obtained.SOLUTION: A charged particle beam device 100 includes: a sample stage 8 for holding a sample 5; an electron beam barrel 1 irradiating the sample 5 held by the sample stage 8 with an electron beam; an FIB barrel (ion beam barrel) 2 irradiating the sample 5 held by the sample stage 8 with an ion beam to conduct etching; and a mobile detector 7 disposed movably on an irradiation axis of the electron beam 1a and detecting scattered electrons which are scattered in the sample 5 with an irradiation of the electron beam 1a and pass through the sample.SELECTED DRAWING: Figure 1