METHOD FOR FORMING COLOR FILTER ARRAY, METHOD FOR MANUFACTURING IMAGING DEVICE AND IMAGING DEVICE

摘要

PROBLEM TO BE SOLVED: To reduce periodical unevenness caused by a color filter array.SOLUTION: A method for forming a color filter array includes steps of: exposing a photosensitive color filter film; forming a color filter array from a color filter film by developing the color filter film using a developing solution; and while rotating the color filter array and moving a nozzle spraying fluid containing liquid and gas in a direction crossing an axis of the rotation on the color filter array, washing the color filter array. The variation of thickness of a color filter generated in the washing step is reduced.SELECTED DRAWING: Figure 3