| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic chuck device and a manufacturing method for the same that can implement both of uniformity of temperature within an electrostatic chuck surface and reliability of electrical connection of an electrode pin.SOLUTION: An electrostatic chuck device 10 has an electrostatic chuck portion 20 having a primary face 21 on which a plate-like sample WF is mounted, and an internal electrode 25 for electrostatic adsorption, a heating member 30 which is formed in the electrostatic chuck portion 20 and heats the electrostatic chuck portion 20, a base portion 60 for temperature adjustment which has a through-hole 63, a primary face adhesive agent layer 50 for making the electrostatic chuck portion 20 and the temperature adjusting base portion 60 adhesively adhere to each other, a through-hole adhesive agent layer 51 which extends from the primary face adhesive agent layer 50 and covers an inner side surface at the primary face adhesive agent layer 50 side out of the inner side surface of the through-hole 63, an electrode pin 40a, 40b which is connected to one of the electrostatic adsorption internal electrode 25 and the heating member 30, and inserted in the through-hole 63 while brought into no contact with the through-hole 63 and the through-hole adhesive agent layer 51, and a stress relaxation region 80 formed between the outer side surface of the electrode pin 40a, 40b and the inner side surface of the through-hole adhesive agent layer 51.SELECTED DRAWING: Figure 1 |
