| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a liquid discharge head which makes wrinkles less likely to occur in a diaphragm even if a base material 1 supporting the diaphragm is completely removed in a manufacturing process.SOLUTION: An upper surface of a diaphragm 13 and a lower surface of a wiring layer 1B are joined by using an adhesive and cavity formation materials 17a, 17b. Young's modulus of the cavity formation materials 17a, 17b are higher than that of the adhesive.SELECTED DRAWING: Figure 5 |
