METHOD OF MANUFACTURING MICRO CONCAVO-CONVEX STRUCTURE, AND SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing a micro concavo-convex structure, which involves forming a micro concavo-convex structure having a concavo-convex pattern with different pitches and levels on a substrate, and to provide a substrate with a micro concavo-convex structure having a concavo-convex pattern with different pitches and levels formed on a surface thereof.SOLUTION: A manufacturing method for a micro concavo-convex structure includes; a surface layer forming step for performing energy irradiation or thin-film material deposition on an elastic substrate while changing an energy irradiation amount or thin-film material deposition amount depending on regions of the substrate to form a surface layer that depends of the energy irradiation amount or thin-film material deposition amount; and a micro concavo-convex structure forming step for applying lateral stress to the surface layer to form a micro concavo-convex structure having a concavo-convex pattern with different levels and/or pitches on the substrate.SELECTED DRAWING: Figure 1