| 摘要 |
PROBLEM TO BE SOLVED: To provide a technique for reducing the impact of ambient air flow on a substrate during transfer thereof.SOLUTION: A transfer apparatus 30a transfers a substrate 90. The transfer apparatus 30a includes a hand 313 for holding the substrate 90, a lifting mechanism 32 for lifting the hand 313 in the vertical direction, a rotating mechanism 33 for rotating the hand 313 about the axis of rotation in the vertical direction, and a housing 34 rotating together with the hand 313 by means of the rotating mechanism 33, and housing the hand internally. Furthermore, the transfer apparatus 30a includes a first arm 311 and a second arm 312 for moving the hand to the inside and outside of the housing 34 through the opening OP of the housing 34, by moving the hand 313 in the horizontal direction, and a door 342 for opening and closing the opening OP of the housing 34.SELECTED DRAWING: Figure 2 |
