| 摘要 |
PROBLEM TO BE SOLVED: To provide a fan filter unit which has good wind speed distribution and which has a smaller number of components for configuring the filter unit.SOLUTION: In a fan filter unit, on a blowout surface of one axial flow fan, a chamber having one pressurizing space is arranged, on a downstream side of the chamber, a punching plate in which a plurality of opening holes are bored is arranged, and on a downstream side of the punching plate, a filter is arranged. In the punching plate, an opening ratio of a range within a first distance from the center of the axial flow fan is made to be smaller than an opening ratio of the range equal to or greater than the first distance from the center of the axial flow fan, and an opening ratio of the range within a second distance from an end surface of the chamber is made to be smaller than an opening ratio of a range equal to or greater than the second distance from the end surface of the chamber.SELECTED DRAWING: Figure 2 |
