| 摘要 |
PROBLEM TO BE SOLVED: To provide a technique which can perform filter exchange by a simple method without stopping utilization of a device.SOLUTION: A coating applicator is equipped with a nozzle for ejecting a flux liquid, and a suction/discharge part which sucks the flux liquid ejected from the nozzle through an intake port and discharges a gas from an exhaust port. The suction/discharge part of the coating applicator has a filter part which filters the flux liquid sucked from the intake port and passes the gas. The filter part is so provided as to be movable in a direction substantially horizontal to a direction of sucking the flux liquid from the intake port and a direction of discharging the gas from the exhaust port. Thus, the coating applicator can perform filter exchange without stopping utilization even if other devices are so located as to be adjacent to both sides of the applicator. As a result, the coating applicator can perform operation without reduction of productivity.SELECTED DRAWING: Figure 6 |
