发明名称 |
A METHOD TO IMPROVE READER STABILITY AND WRITER OVERWRITE BY PATTERNED WAFER ANNEALING |
摘要 |
A method of fabricating a tunneling magnetoresistance (TMR) reader is disclosed. A TMR structure comprising at least one ferromagnetic layer and at least one nonmagnetic insulating layer is provided. A first thermal annealing process on the TMR structure is performed. A reader pattern definition process performed on the TMR structure to obtain a patterned TMR reader. A second thermal annealing process is performed on the patterned TMR reader. |
申请公布号 |
HK1153843(A1) |
申请公布日期 |
2016.04.08 |
申请号 |
HK20110107781 |
申请日期 |
2011.07.26 |
申请人 |
WESTERN DIGITAL (FREMONT) LLC |
发明人 |
LU YUAN L;JIAN X. SHEN JX;GEOFFREY W. ANDERSON GW;CHRISTOPHER NG C |
分类号 |
G11B |
主分类号 |
G11B |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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