| 摘要 |
The embodiment of the present invention relates to a gate valve assembly which includes a gate valve assembly housing body which has an opening part for inputting and outputting a substrate, a blocking head which has a sealing surface for sealing the opening part, a valve rod which is connected to the blocking head, and a working unit which is connected to the valve rod and moves the blocking head. The gate valve assembly can include a first gas flow path which is formed in the blocking head; a horizontal gas injection part which is formed on the sealing surface of the blocking head of the blocking head to inject a gas supplied to the first gas flow path; and a first gas supply part for supplying the gas to the first gas flow path. So, a venting effect can be improved. |
