| 摘要 |
PROBLEM TO BE SOLVED: To provide a mist collection device capable of improving capture amount of mist.SOLUTION: A mist collection device 1 includes: a suction duct 10; a fan unit 20 for sucking and discharging atmosphere of a processing chamber 110; and mist removal means 30 for capturing and removing mist in the atmosphere. The mist removal means 30 includes: a housing 31 to which the suction duct 10 is connected; a mist capturing section 32 stored in the housing 31; and drain water means 33 for draining liquid L made of the captured mist. The mist capturing section 32 includes a first demister 32a on an upstream side of an air current F and a second demister 32b having meshes finer than those of the first demister 32a on a downstream side of the air current F. Cooling means 34 is disposed to cool the passing air current F between the first demister 32a and the second demister 32b. Clean air discharged via the fan unit 20 is discharged into a clean room or is returned to the processing chamber 110.SELECTED DRAWING: Figure 1 |
