发明名称 SEMICONDUCTOR DEVICE
摘要 A semiconductor device includes: a semiconductor substrate having a main plane; a semiconductor element provided on the main plane of the semiconductor substrate; an electrode pad provided on the main plane of the semiconductor substrate and connected to the semiconductor element; a guard ring surrounding the semiconductor element and the electrode pad, and provided on the main plane of the semiconductor substrate; and an insulating film covering all region of a semiconductor of the main plane of the semiconductor substrate exposed inside the guard ring, wherein the insulating film is made of a water impermeable material.
申请公布号 US2016099193(A1) 申请公布日期 2016.04.07
申请号 US201514796674 申请日期 2015.07.10
申请人 Mitsubishi Electric Corporation 发明人 NOGAMI Yoichi
分类号 H01L23/31;H01L23/00;H01L23/58 主分类号 H01L23/31
代理机构 代理人
主权项 1. A semiconductor device comprising: a semiconductor substrate having a main plane; a semiconductor element provided on the main plane of the semiconductor substrate; an electrode pad provided on the main plane of the semiconductor substrate and connected to the semiconductor element; a guard ring surrounding the semiconductor element and the electrode pad, and provided on the main plane of the semiconductor substrate; and an insulating film covering the semiconductor element and a portion of the semiconductor substrate comprising the semiconductor substrate inside the guard ring and directly contacting to, wherein the insulating film is made of a water impermeable material and is brought into direct contact with the guard ring and the main plane of the semiconductor substrate in a region where the semiconductor element is not provided.
地址 Tokyo JP