发明名称 SB-TE-TI PHASE-CHANGE MEMORY MATERIAL AND TI-SB2TE3 PHASE-CHANGE MEMORY MATERIAL
摘要 An Sb—Te—Ti phase-change thin-film material applicable to a phase-change memory and preparation thereof. The Sb—Te—Ti phase-change memory material is formed by doping an Sb—Te phase-change material with Ti, Ti forms bonds with both Sb and Te, and the Sb—Te—Ti phase-change memory material has a chemical formula SbxTeyTi100-x-y, where 0<x<80 and 0<y<100−x. When the Sb—Te—Ti phase-change memory material is a Ti—Sb2Te3 phase-change memory material, Ti atoms replace Sb atoms, and phase separation does not occur. The crystallization temperature of the Sb—Te—Ti phase-change memory material is significantly risen, retention is improved, and thermal stability is enhanced; meanwhile, the amorphous state resistance decreases, and the crystalline state resistance increases; and the Sb—Te—Ti phase-change memory material has wide application in phase-change memories.
申请公布号 US2016099050(A1) 申请公布日期 2016.04.07
申请号 US201514966348 申请日期 2015.12.11
申请人 SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY, CHINESE ACADEMY OF SCIENCES 发明人 WU Liangcai;ZHU Min;SONG Zhitang;RAO Feng;PENG Cheng;ZHOU Xilin;REN Kun;FENG Songlin
分类号 G11C13/00 主分类号 G11C13/00
代理机构 代理人
主权项 1. An Sb—Te—Ti phase-change memory material for a phase-change memory, formed by doping an Sb—Te phase-change memory material with Ti, and having a chemical formula of SbxTeyTi100-x-y, wherein 45≦x≦72, and y=x/2.
地址 Shanghai CN