发明名称 SEMICONDUCTOR DEVICE AND INSPECTION METHOD OF THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device and an inspection method of the same, which can identify a broken semiconductor chip in an unsealed state without unsealing the semiconductor device.SOLUTION: In a semiconductor device, each of a plurality of IGBT chips 2 includes a failure identification pattern 5 formed by a plurality of dots is formed on a surface of each IGBT chip 2. Also on each of a plurality of diode chips, a failure identification pattern is formed. Each dot of the failure identification pattern 5 is formed by a sintering silver paste 5a obtained by applying a small amount of a silver paste so as to contact a surface of a surface electrode formed on a semiconductor substrate and sintering the silver paste 5a.SELECTED DRAWING: Figure 2
申请公布号 JP2016048751(A) 申请公布日期 2016.04.07
申请号 JP20140173652 申请日期 2014.08.28
申请人 MITSUBISHI ELECTRIC CORP 发明人 TAKENAKA MICHIAKI
分类号 H01L21/02;G01N23/04;G01N23/05;G01N23/18;G01N29/11;H01L21/66;H01L23/00 主分类号 H01L21/02
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