| 摘要 |
PROBLEM TO BE SOLVED: To provide a manifold valve which can eliminate a manifold block joint by a small change, and a fluid control device having the manifold valve.SOLUTION: A manifold valve comprises: a plurality of first gateway passages 31, as a plurality of fluid passages 31, 32, 33, 34 and 35 of a passage block 30, whose upper ends communicate with first ports 14a, respectively, and whose lower ends are located in the passage block 30; a plurality of first external communication passages 32 whose upper ends communicate with the lower ends of the first gateway passages 31, respectively, and whose lower ends are opened at a lower face of the passage block 30; second external communication passages 33 whose upper ends communicate with the lower ends of the first gateway passages 31, respectively, and whose other ends are opened at the lower face of the passage block 30 in positions different from those of the first external communication passages 32; a plurality of second gateway passages 34 whose upper ends communicate with second ports 14b, respectively, and whose lower ends are located in the passage block 30; and internal communication passages 35 which make the lower ends of the second gateway passages 34 communicate with each other.SELECTED DRAWING: Figure 5 |
