| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a crystal element in which an electrode part is formed in a crystal piece having a vibration part and a fixation part which are different in thickness in the vertical direction, the method reducing influence of the fixation part on vibration of the vibration part and improving the productivity.SOLUTION: On anticorrosion films 20a and 20b formed on a crystal wafer 10, a resist film 30 is formed, exposed and developed, and the anticorrosion films 20a and 20b having no resist film 30 left thereon are removed. Then, the resultant product is immersed in a prescribed etching solution. The direction from the vibration part 111a to the fixation part is made the same direction as the positive direction of the X axis, while a crystal piece is formed so that a part of the fixation part 111b is fixed to the crystal wafer, a tabular buffer part 111c is formed between the vibration part 111a and the fixation part 111b, a ramp part 111d which increases the thickness thereof in the vertical direction from the vibration part 111a to the fixation part 111b is formed on a lower surface of the buffer part 111c, and an electrode part 113 is formed at a prescribed position of the crystal piece 111.SELECTED DRAWING: Figure 3 |
