| 发明名称 |
NANO-APERTURE FABRICATION USING TEMPLATE GUIDED THERMAL DEWETTING |
| 摘要 |
A method for fabrication of metal film with nanoapertures is provided. The method includes the steps of providing a nanopatterned template including a plurality of nanostructures, depositing of the metal film onto the nanopatterned template, and thermally induced dewetting of the metal film to define the nanoapertures in the metal film by diffusion and reflow of the metal film. |
| 申请公布号 |
US2016097116(A1) |
申请公布日期 |
2016.04.07 |
| 申请号 |
US201514873293 |
申请日期 |
2015.10.02 |
| 申请人 |
Agency for Science, Technology and Research |
发明人 |
Yang Joel Kwang Wei;Wang Ying Min;Asbahi Mohamed;Zhang Yong-Wei;Lu Liangxing;Srinivasan Bharathi Madurai |
| 分类号 |
C23C10/60 |
主分类号 |
C23C10/60 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A method for fabrication of metal film with nanoapertures comprising:
providing a nanopatterned template comprising a plurality of nano structures; depositing the metal film onto the nanopatterned template; and thermally induced dewetting of the metal film to define the nanoapertures in the metal film by diffusion and reflow of the metal film. |
| 地址 |
Singapore SG |
