APPARATUS FOR SUPPORTING A SEMICONDUCTOR WAFER AND METHOD OF VIBRATING A SEMICONDUCTOR WAFER

摘要

In embodiments of the present disclosure, a vibrator is used to generate a vibration wave with a variable frequency that can agitate and facilitate the circulation of the processing fluids, thereby enhancing the uniformity and efficiency of the resulting semiconductor device features, the vibrator may be a piezoelectric vibrator or other similar vibrators. In some embodiments, the vibration of the processing fluids can facilitate the processing fluids in circulating in and out of narrow channels or features, or the vibration of the processing fluids can facilitate the bubbling out of the microbubbles entrapped in the processing liquid or entrapped between the surface of the semiconductor wafer and the processing liquid. In another embodiment, the vibrations generated by the vibrator have vibration waves with a variable frequency to avoid resonance that may damage the semiconductor wafer and the features thereon.

主权项

1. An apparatus for supporting a semiconductor wafer, comprising:
a wafer supporter; and a vibrator coupled to said wafer supporter and configured to generate a vibration wave with a variable frequency on said semiconductor wafer.