发明名称 PRESSURE-REGULATED GAS SUPPLY VESSEL
摘要 A gas storage and dispensing vessel, including a vessel container defining a gas storage interior volume, and a valve head regulator assembly secured to the vessel container, the valve head regulator assembly including a single gas pressure regulator disposed in the interior volume of the vessel container, and a valve head including a pneumatic flow control valve, wherein the single regulator is configured with a set point pressure of at least 0.5 MPa, and wherein the interior volume of the vessel container is at least 5 L.
申请公布号 WO2016054363(A1) 申请公布日期 2016.04.07
申请号 WO2015US53473 申请日期 2015.10.01
申请人 ENTEGRIS, INC. 发明人 DESPRES, JOSEPH, R.;SWEENEY, JOSEPH, D.;AVILA, ANTHONY, M.
分类号 F17C13/04;F16K17/00;H01L21/02;H01L21/306 主分类号 F17C13/04
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