发明名称 |
PRESSURE-REGULATED GAS SUPPLY VESSEL |
摘要 |
A gas storage and dispensing vessel, including a vessel container defining a gas storage interior volume, and a valve head regulator assembly secured to the vessel container, the valve head regulator assembly including a single gas pressure regulator disposed in the interior volume of the vessel container, and a valve head including a pneumatic flow control valve, wherein the single regulator is configured with a set point pressure of at least 0.5 MPa, and wherein the interior volume of the vessel container is at least 5 L. |
申请公布号 |
WO2016054363(A1) |
申请公布日期 |
2016.04.07 |
申请号 |
WO2015US53473 |
申请日期 |
2015.10.01 |
申请人 |
ENTEGRIS, INC. |
发明人 |
DESPRES, JOSEPH, R.;SWEENEY, JOSEPH, D.;AVILA, ANTHONY, M. |
分类号 |
F17C13/04;F16K17/00;H01L21/02;H01L21/306 |
主分类号 |
F17C13/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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