| 摘要 |
PROBLEM TO BE SOLVED: To provide an air spindle unit which prevents a portion facing a clearance forming an air bearing from being eroded.SOLUTION: An air spindle unit 1 includes: at least a rotary spindle 2; a housing 3 having a radial air bearing 10 and a thrust air bearing 20 and rotatably supporting the rotary spindle 2; and an air supply path 70 configured to supply high pressure air to the radial air bearing 10 and the thrust air bearing 20. Protective coats 9 are formed on at least surfaces 210a, 210b of a thrust plate 21 and a thrust surface 5b of the housing 3. Thus, even if water or moisture enters into a clearance 8, the air spindle unit 1 prevents corrosion from occurring on the thrust surface 5b and the surfaces 210a, 210b. Therefore, the air spindle unit 1 prevents dirt generated by corrosion from hindering rotation of the rotary spindle 2.SELECTED DRAWING: Figure 1 |
