| 摘要 |
Provided are a shape measurement device, and the like, capable of reducing error corresponding to length measurement distance and carrying out highly accurate shape measurement when light is used to contactlessly measure the shape of a surface to be measured having a spherical shape. A shape measurement device 1 is provided with: a holder 12 for holding an object of measurement 20, a sensor 7 for irradiating light onto a surface to be measured 21 and contactlessly measuring the distance to the surface to be measured 21, an encoder 5 for rotating the sensor 7 around a central axis R1, a slide rail 4 and bar 6 that constitute a sensor movement mechanism for moving the sensor 7 along an axis R2 that is orthogonal to the central axis R1 and are capable of moving the sensor 7 on both sides of the point of intersection with the central axis R1, an XYZ stage for moving the holder 12 along the Z axis and within an XY plane, and a control device 14 for calculating the position of a sphere center of the surface to be measured 21 on the basis of measurement values output by the sensor 7 and carrying out control so as to make the position of the sphere center coincide with the center of rotation C of the sensor 7. |
