| 摘要 |
PROBLEM TO BE SOLVED: To provide an improved magnetic field sensor and a manufacturing method therefor.SOLUTION: A magnetic field sensor has three bridge circuits (101, 111, 121), each including magnetoresistive sensors coupled as a Wheatstone bridge (100) to sense a magnetic field (160) in three orthogonal directions (110, 120, 130) that are set with a single pinning material deposition and bulk wafer setting procedure. One of the three bridge circuits (121) includes a first magnetoresistive sensor (141) comprising a first sensing element (122) disposed on a pinned layer (126) and having first and second edges and first and second sides, and a first flux guide (132) disposed non-parallel to the first side of a substrate and having an end that is proximate to the first edge and on the first side of the first sensing element (122). An optional second flux guide (136) is disposed non-parallel to the first side of the substrate, and has an end that is proximate to the second edge and the second side of the first sensing element (122).SELECTED DRAWING: Figure 1 |
