| 摘要 |
PROBLEM TO BE SOLVED: To provide a new family of dielectric oxides, and to provide a new method for making these oxides via a solution chemistry route.SOLUTION: This invention relates to dielectric oxide materials, prepared by producing a sol from a mixture of a metal oxide precursor, a solvent, and an epoxide, and by preparing a metal oxide material from the sol. In various forms, the mixture can also include a cosolvent, one or more additional metal oxide precursors, water, or a precursor to a glass-forming oxide, or any combination thereof. The prepared dielectric oxide materials can be in the form of thin films having high κ values, low electrical leakage, and low dielectric loss tangent values.SELECTED DRAWING: None |
