OPTICAL APPARATUS AND MANUFACTURING METHOD USING THE SAME

摘要

An optical apparatus and a manufacturing method using the optical apparatus are disclosed. The optical apparatus includes a stage supporting a substrate, first optical systems providing a first light onto the substrate, a gantry supporting the first optical systems to transfer them on the stage, and second optical systems disposed between the gantry and the stage and detecting displacement of the first optical systems. Each of the second optical systems includes a beam source generating a second light different with the first light, and sensor arrays for sensing the second light provided to the first optical systems to detect displacement of the first optical systems.

主权项

1. An optical apparatus, comprising:
a stage configured to support a substrate; a first optical system configured to provide a first light onto the substrate; a gantry configured to support the first optical system to transfer the first optical system above the stage; and a second optical system disposed between the gantry and the stage to detect displacement of the first optical system, wherein the second optical system comprises: a beam source configured to generate a second light that is different from the first light; and a sensor array configured to receive the second light provided to the first optical system to detect the displacement of the first optical system.