LIGHT SOURCE SYSTEM, BEAM TRANSMISSION SYSTEM, AND EXPOSURE DEVICE

摘要

This light source system may be provided with: a free electron laser device that outputs pulsed laser light toward an exposure device; and a delay optical system, which is disposed on an optical path between the free electron laser device and the exposure device, and which delays the pulsed laser light such that a delay quantity changes corresponding to a position within a beam cross-sectional surface.