ELECTROSTATIC CHUCK DEVICE

摘要

This electrostatic chuck device uses electrostatic attraction electrodes to attract a plate-shaped sample, and cools the plate-shaped sample. The electrostatic chuck device is provided with an electrostatic chuck part which has, as a formation material, a ceramic sintered body, and in which one main surface is a placement surface on which the plate-shaped sample is placed. A plurality of protrusions for supporting the plate-shaped sample are provided to the placement surface. Top surfaces of the protrusions come into contact with the plate-shaped sample to support the plate-shaped sample. The protrusions each have a cross-sectional area which gradually increases from the height position of the top surface downwards. The cross-sectional area of each of the protrusions at a position 0.6 µm below the lower edge of the top surface is not more than 110% of the cross-sectional area at the lower edge of the top surface.