发明名称 |
THREE-AXIS ELECTRON MICROSCOPE HOLDER WITH A SIMPLE STRUCTURE |
摘要 |
The present invention relates to a holder with a simple structure that can substitute for an existing sample stage in an electron microscope and, more specifically, to an electron microscope holder comprising: (A) a sample mounting part that includes a sample cradle having a beam transmission hole formed in the center thereof and a support plate on which the sample cradle is seated; (B) a base part having an opening in which the sample mounting part is accommodated with a predetermined clearance therebetween; and (C) two or more sets of drive parts, each of which includes: a pair of rotary mounts coupled to the base part and the support plate to horizontally rotate, respectively; a driver fixedly coupled to one of the rotary mounts; and a drive rod that is coupled to the driver so as to horizontally move and performs a linear motion by the operation of the driver, one distal end of the drive rod being fixedly coupled to the other of the rotary mounts. |
申请公布号 |
WO2016052776(A1) |
申请公布日期 |
2016.04.07 |
申请号 |
WO2014KR09146 |
申请日期 |
2014.09.30 |
申请人 |
KOREA BASIC SCIENCE INSTITUTE |
发明人 |
JEUNG, JONG-MAN;KIM, YOUN-JOONG;KIM, JIN-GYU;KIM, JONG GU |
分类号 |
H01J37/20;H01J37/26 |
主分类号 |
H01J37/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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