SILICONE SKELETON-CONTAINING POLYMER COMPOUND AND METHOD FOR PRODUCING SAME, CHEMICALLY AMPLIFIED NEGATIVE RESIST COMPOSITION, PHOTO-CURABLE DRY FILM AND METHOD FOR PRODUCING SAME, PATTERNING PROCESS, LAYERED PRODUCT, AND SUBSTRATE

摘要

The present invention provides a silicone skeleton-containing polymer compound containing a repeating unit shown by the general formula (1) and having a weight average molecular weight of 3,000 to 500,000. There can be provided a silicone skeleton-containing polymer compound suitable used as a base resin of a chemically amplified negative resist composition that can remedy the problem of delamination generated on a metal wiring such as Cu and Al, an electrode, and a substrate, especially on a substrate such as SiN, and can form a fine pattern without generating a scum and a footing profile in the pattern bottom and on the substrate when the widely used 2.38% TMAH aqueous solution is used as a developer.;

主权项

1. A silicone skeleton-containing polymer compound comprising a repeating unit shown by the general formula (1) and having a weight average molecular weight of 3,000 to 500,000, wherein R1 to R4 may be the same or different and represent a monovalent hydrocarbon group having 1 to 8 carbon atoms; “m” is an integer of 1 to 100; “a”, “b”, “c”, “d”, “e”, and “f” are each 0 or a positive number, and “g” and “h” are each a positive number, provided that a+b+c+d+e+f+g+h=; X is a divalent organic group shown by the general formula (2); Y is a divalent organic group shown by the general formula (3); W is a divalent organic group shown by the general formula (4); and U is a divalent organic group shown by the general formula (5), wherein Z represents a divalent organic group selected from any of the dotted line represents a bond; “n” is 0 or 1; R5 and R6 each represent an alkyl group or alkoxy group having 1 to 4 carbon atoms and may be the same or different; and “x” is 0, 1, or 2; wherein V represents a divalent organic group selected from any of the dotted line represents a bond; “p” is 0 or 1; R7 and R8 each represent an alkyl group or alkoxy group having 1 to 4 carbon atoms and may be the same or different; and “y” is 0, 1, or 2; wherein the dotted line represents a bond; T represents an alkylene group having 1 to 10 carbon atoms or a divalent aromatic group; and R9 represents a hydrogen atom or a methyl group; wherein the dotted line represents a bond; T and R9 have the same meanings as defined above; and R10 represents a monovalent carboxyl-containing organic group.