| 摘要 |
PROBLEM TO BE SOLVED: To provide a light intensity measuring device capable of measuring intensity of light generated by interaction with an object, with a widened dynamic range, and with practical accuracy.SOLUTION: The light intensity measuring device includes: an irradiation system; a measurement system; and a variable neutral density filter. The irradiation system irradiates an object to be inspected with irradiation light. The measurement system measures intensity of light generated by interaction between the irradiation light and the object to be inspected. The variable neutral density filter dims at least one of the irradiation light and the light generated by interaction, with different dimming rates that can be consecutively changed. Before the measurement of the light generated by interaction, the measurement system counts photons of the light dimmed with the respective dimming rates, using a photon counter. Then, using calibration values of the dimming rates calculated on the basis of the count result of photons, the measurement system calculates the intensity of the light generated by interaction, in a case where neither the irradiation light nor the light generated by interaction is dimmed, or in a case where at least one of the irradiation light and the light generated by interaction is dimmed with the same dimming rate.SELECTED DRAWING: Figure 1 |
