INTEGRATED ELECTROSTATIC DISCHARGE (ESD) CLAMPING

摘要

A method of fabricating a laterally diffused metal-oxide-semiconductor (LDMOS) transistor device having a bipolar transistor for electrostatic discharge (ESD) protection includes doping a substrate to form a body region of the LDMOS transistor device in the substrate, the body region having a first conductivity type, forming a doped isolating region of the LDMOS transistor device in the substrate, the doped isolating region having a second conductivity type and surrounding a device area of the LDMOS transistor device in which the body region is disposed, forming a base contact region of the bipolar transistor, the base contact region being disposed within the body region and having the first conductivity type, and doping the substrate to form an isolation contact region for the doped isolating region that defines a collector region of the bipolar transistor, to form source and drain regions of the LDMOS transistor device in the substrate, and to form an emitter region of the bipolar transistor within the body region.

主权项

1. A method of fabricating a laterally diffused metal-oxide-semiconductor (LDMOS) transistor device having a bipolar transistor for electrostatic discharge (ESD) protection, the method comprising:
doping a substrate to form a body region of the LDMOS transistor device in the substrate, the body region having a first conductivity type; forming a doped isolating region of the LDMOS transistor device in the substrate to define a collector region of the bipolar transistor, the doped isolating region having a second conductivity type and surrounding a device area of the LDMOS transistor device in which the body region is disposed; forming a base contact region of the bipolar transistor, the base contact region being disposed within the body region and having the first conductivity type; and doping the substrate to form an isolation contact region for the doped isolating region, to form source and drain regions of the LDMOS transistor device in the substrate, and to form an emitter region of the bipolar transistor spaced from the source region within the body region.