发明名称 |
MECHANICAL STRUCTURE COMPRISING AN ACTUATOR AND MECHANICAL AMPLIFICATION MEANS, AND PRODUCTION METHOD |
摘要 |
The invention relates to a mechanical structure comprising a stack containing an active substrate (10) and at least one actuator (20) suitable for generating vibrations in the region of said active substrate, said stack comprising a basic structure for the amplification of said vibrations (30), arranged between said actuator and said active substrate, the structure being used to transmit and amplify said vibrations; and comprising at least one trench (Ti) arranged between said actuator and said active substrate. The invention also relates to a method for producing said structure, comprising the use of a temporary substrate. |
申请公布号 |
WO2016050832(A1) |
申请公布日期 |
2016.04.07 |
申请号 |
WO2015EP72536 |
申请日期 |
2015.09.30 |
申请人 |
COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIESALTERNATIVES;STMICROELECTRONICS (CROLLES 2) SAS;UNIVERSITÉ JOSEPH FOURIER - GRENOBLE 1 |
发明人 |
CASSET, FABRICE;BASROUR, SKANDAR;CHAPPAZ, CÉDRICK;DANEL, JEAN-SÉBASTIEN |
分类号 |
B81B3/00;H01L41/09;H02N2/00 |
主分类号 |
B81B3/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|