发明名称 MECHANICAL STRUCTURE COMPRISING AN ACTUATOR AND MECHANICAL AMPLIFICATION MEANS, AND PRODUCTION METHOD
摘要 The invention relates to a mechanical structure comprising a stack containing an active substrate (10) and at least one actuator (20) suitable for generating vibrations in the region of said active substrate, said stack comprising a basic structure for the amplification of said vibrations (30), arranged between said actuator and said active substrate, the structure being used to transmit and amplify said vibrations; and comprising at least one trench (Ti) arranged between said actuator and said active substrate. The invention also relates to a method for producing said structure, comprising the use of a temporary substrate.
申请公布号 WO2016050832(A1) 申请公布日期 2016.04.07
申请号 WO2015EP72536 申请日期 2015.09.30
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIESALTERNATIVES;STMICROELECTRONICS (CROLLES 2) SAS;UNIVERSITÉ JOSEPH FOURIER - GRENOBLE 1 发明人 CASSET, FABRICE;BASROUR, SKANDAR;CHAPPAZ, CÉDRICK;DANEL, JEAN-SÉBASTIEN
分类号 B81B3/00;H01L41/09;H02N2/00 主分类号 B81B3/00
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