CORROSION-RESISTANT MEMBER, MEMBER FOR ELECTROSTATIC CHUCK, AND PROCESS FOR PRODUCING CORROSION-RESISTANT MEMBER

摘要

The present invention provides: a corrosion-resistant member that, when used as a member for an electrostatic chuck, can enhance the attraction force of the electrostatic chuck to which an electric field is being applied and that can weaken the residual attraction force of the electrostatic chuck at the time when application of the electric field was stopped; a member for electrostatic chucks; and a process for producing the corrosion-resistance member. This corrosion-resistant member comprises an oxide which contains samarium and aluminum and has a perovskite-type structure. This member for electrostatic chucks comprises this corrosion-resistant member. This process for producing the corrosion-resistant member comprises a step in which an aluminum oxide powder and a samarium oxide powder are mixed with a solvent to produce a slurry containing the aluminum oxide powder and samarium oxide powder, a step in which the slurry is dried to produce a mixture powder comprising the aluminum powder and samarium oxide powder and the mixture powder is molded to produce a molded object, and a step in which the molded object is burned to produce a sintered object.