| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a substrate for a power module capable of joining a ceramic substrate and a metal layer in a short time.SOLUTION: A laminate 30 formed by laminating a ceramic substrate 2 and metal layers 6, 7 by interposing a bonding material between them, and a cushion sheet 40 having a carbon layer 42 formed on both surfaces of a graphite layer 41 are laminated with each other and heated in a state where an increase in the height of these laminates is restricted, thereby manufacturing a substrate for a power module by joining the ceramic substrate 2 and the metal layers 6, 7. |
