| 摘要 |
PROBLEM TO BE SOLVED: To provide a dynamic quantity sensor that can detect scales, directions and accelerations of external force, has a simple structure and can be easily manufactured, and a method for manufacturing the dynamic quantity sensor.SOLUTION: The dynamic quantity sensor includes: a first substrate; a second substrate joined via a sealing material with the first substrate; a space enclosed by the first substrate, the second substrate and the sealing material; a stationary part disposed on the first substrate; a movable electrode including a movable part in which one end is supported by the stationary part and the other end is movable in the space with respect to the stationary part; a fixed electrode disposed on the second substrate and adjoining to the other end of the movable electrode; a first terminal electrically connected to the movable electrode; and a second terminal electrically connected to the fixed electrode. When no external force is applied, the other end of the movable electrode is electrically connected to the fixed electrode by distortion of the movable electrode caused by internal stress of a first film; and when external force is applied, the other end is displaced in accordance with the applied external force to come into electrically non-contact with the fixed electrode. |
