发明名称 |
NON-PLANAR DEVICE HAVING UNIAXIALLY STRAINED FIN AND METHOD OF MAKING SAME |
摘要 |
A method and a device made according to the method. The method comprises providing a substrate including a first material, and providing a fin including a second material, the fin being disposed on the substrate and having a device active portion, the first material and the second material presenting a lattice mismatch between respective crystalline structures thereof. Providing the fin includes providing a biaxially strained film including the second material on the substrate; and removing parts of the biaxially strained film to form a substantially uniaxially strained fin therefrom. |
申请公布号 |
EP2619797(A4) |
申请公布日期 |
2016.04.06 |
申请号 |
EP20110827279 |
申请日期 |
2011.09.19 |
申请人 |
INTEL CORPORATION |
发明人 |
CEA, STEPHEN M.;KOTLYAR, ROZA;KAVALIEROS, JACK T.;GILES, MARTIN D.;GHANI, TAHIR;KUHN, KELIN J.;KUHN, MARKUS;ZELICK, NANCY M. |
分类号 |
H01L29/78;H01L21/336;H01L29/10 |
主分类号 |
H01L29/78 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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