发明名称 Method for releasing a graphene layer
摘要 A method is used for releasing a graphene layer from a substrate. A graphene layer (111) is first formed on a surface of a first substrate (101). A metal layer (120) is then formed on a surface of the graphene layer. A pulling force is then applied to the metal layer to detach the graphene layer from the first substrate. The released graphene layer is bonded by intermolecular force onto a surface of a second substrate (130) separate from the first substrate or onto a surface of a bonding layer formed on the surface of the second substrate. The metal layer is then removed, by for example, etching.
申请公布号 EP2267761(B1) 申请公布日期 2016.04.06
申请号 EP20100167099 申请日期 2010.06.23
申请人 OKI DATA CORPORATION 发明人 OGIHARA, MITSUHIKO;SAGIMORI, TOMOHIKO;SAKUTA, MASAAKI;HASHIMOTO, AKIHIRO;TANAKA, SATORU
分类号 H01L21/20 主分类号 H01L21/20
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