发明名称 |
Method for releasing a graphene layer |
摘要 |
A method is used for releasing a graphene layer from a substrate. A graphene layer (111) is first formed on a surface of a first substrate (101). A metal layer (120) is then formed on a surface of the graphene layer. A pulling force is then applied to the metal layer to detach the graphene layer from the first substrate. The released graphene layer is bonded by intermolecular force onto a surface of a second substrate (130) separate from the first substrate or onto a surface of a bonding layer formed on the surface of the second substrate. The metal layer is then removed, by for example, etching. |
申请公布号 |
EP2267761(B1) |
申请公布日期 |
2016.04.06 |
申请号 |
EP20100167099 |
申请日期 |
2010.06.23 |
申请人 |
OKI DATA CORPORATION |
发明人 |
OGIHARA, MITSUHIKO;SAGIMORI, TOMOHIKO;SAKUTA, MASAAKI;HASHIMOTO, AKIHIRO;TANAKA, SATORU |
分类号 |
H01L21/20 |
主分类号 |
H01L21/20 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|