| 摘要 |
<P>PROBLEM TO BE SOLVED: To facilitate deposition of a high definition thin film pattern without using a shadow mask. <P>SOLUTION: The vacuum deposition method includes a step for charging the deposition molecules 23 of an organic EL material evaporated from an evaporation source 2 before reaching a substrate 5 for organic EL display, a step for electrifying a resistor 21 provided in contact electrically with the surface of a pixel electrode 14, located corresponding to a point where a luminous layer 16 is formed, on the substrate side by applying a voltage having a polarity different from the charging polarity of the charged deposition molecules 23 so that a temperature limited not to cause sublimation of the organic EL material occurs therein, and a step for electrifying a resistor 21 provided in contact electrically with the surface of a pixel electrode 14, located corresponding to a point where a luminous layer 16 is not formed, on the substrate side by applying a voltage having the same polarity as the charging polarity of the charged deposition molecules 23 so that a temperature sufficient for causing sublimation of the organic EL material occurs therein. <P>COPYRIGHT: (C)2013,JPO&INPIT |
