发明名称 SINGLE-CRYSTAL SILICON PULLING SILICA CONTAINER AND MANUFACTURING METHOD THEREOF
摘要 The present invention provides a single-crystal silicon pulling silica container including an outer layer made of opaque silica glass containing gaseous bubbles and an inner layer made of transparent silica glass that does not substantially contain the gaseous bubbles; the container also including: a bottom portion, a curved portion, and a straight body portion, wherein continuous grooves are formed on a surface of the inner layer from at least part of the bottom portion to at least part of the straight body portion through the curved portion. As a result, there are provided the single-crystal silicon pulling silica container that can reduce defects called voids or pinholes in the pulled single-crystal silicon and a method for manufacturing such a silica container.
申请公布号 EP2687623(B1) 申请公布日期 2016.04.06
申请号 EP20120857311 申请日期 2012.10.02
申请人 SHIN-ETSU QUARTZ PRODUCTS CO., LTD. 发明人 YAMAGATA, SHIGERU
分类号 C03B19/09;C03B20/00;C03C3/06;C30B15/10;C30B29/06 主分类号 C03B19/09
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